MEMS Technology: A Review

Manish Kumar Mishra *

School of Engineering and Technology, Career Point University, Kota, Rajasthan, 324005, India.

Vikas Dubey

Department of Physics, Bhilai Institute of Technology, Raipur, CG, 493661, India.

P. M. Mishra

Department of Mechanical Engineering, MANIT, Bhopal, MP, India

Isharat Khan

Department of Electrical Engineering, MANIT, Bhopal, MP, India.

*Author to whom correspondence should be addressed.


Abstract

This review article through light on a highly promising & demanding technology, which is set to revolutionize nearly every product category in present era, while discussing the Concept, Design & Development, Fabrication techniques and applications of micro electro-mechanical systems (MEMS) based Devices or systems. Microelectromechanical system discloses outstanding flexibility and adaptability in miniaturization devices followed by their compact dimension, low power consumption, and fine performance. The MEMS devices have numerous and very high potentials of creating a new field of applications for mobile equipment’s with increased flexibility & more reliability. This work deals with research carried out for the development of MEMS based sensors & Actuators and appropriate uses of MEMS. This work carries information’s regarding subsequent commercial and real life applications of MEMS and discusses various recent technological innovations carried out with their advantages & disadvantages. This work also describes the historical development of micro-electromechanical system (MEMS) sensor technology.

Keywords: MEMS, scaling of MEMS devices, categorization and applications of MEMS, sensors, actuators, MEMS design & fabrication processes, materials for MEMS.


How to Cite

Mishra, M. K., Dubey, V., Mishra, P. M., & Khan, I. (2019). MEMS Technology: A Review. Journal of Engineering Research and Reports, 4(1), 1–24. https://doi.org/10.9734/jerr/2019/v4i116891

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