MEMS Technology: A Review

Main Article Content

Manish Kumar Mishra
Vikas Dubey
P. M. Mishra
Isharat Khan

Abstract

This review article through light on a highly promising & demanding technology, which is set to revolutionize nearly every product category in present era, while discussing the Concept, Design & Development, Fabrication techniques and applications of micro electro-mechanical systems (MEMS) based Devices or systems. Microelectromechanical system discloses outstanding flexibility and adaptability in miniaturization devices followed by their compact dimension, low power consumption, and fine performance. The MEMS devices have numerous and very high potentials of creating a new field of applications for mobile equipment’s with increased flexibility & more reliability. This work deals with research carried out for the development of MEMS based sensors & Actuators and appropriate uses of MEMS. This work carries information’s regarding subsequent commercial and real life applications of MEMS and discusses various recent technological innovations carried out with their advantages & disadvantages. This work also describes the historical development of micro-electromechanical system (MEMS) sensor technology.

Keywords:
MEMS, scaling of MEMS devices, categorization and applications of MEMS, sensors, actuators, MEMS design & fabrication processes, materials for MEMS.

Article Details

How to Cite
Mishra, M. K., Dubey, V., Mishra, P. M., & Khan, I. (2019). MEMS Technology: A Review. Journal of Engineering Research and Reports, 4(1), 1-24. https://doi.org/10.9734/jerr/2019/v4i116891
Section
Review Article